Photoelastic characterization of residual stress in GaAs-wafers - Concepedia

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Photoelastic characterization of residual stress in GaAs-wafers

24

Citations

10

References

2006

Year

H.‐D. Geiler, H. Karge, Matthias Wagner, S. Eichler, M. Jurisch, U. Kretzer, M. Scheffer‐Czygan

Materials Science in Semiconductor Processing

Electrical EngineeringEngineeringOptical PropertiesApplied PhysicsResidual StressPhotoelectric MeasurementMicroelectronicsOptoelectronicsCompound Semiconductor

References

	Year	Citations

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