Comparison of thermally and mechanically induced Si layer transfer in hydrogen-implanted Si wafers - Concepedia

Concepedia

Publication | Closed Access

Comparison of thermally and mechanically induced Si layer transfer in hydrogen-implanted Si wafers

18

Citations

10

References

2003

Year

T. Höchbauer, Amit Misra, M. Nastasi, Kimmo Henttinen, Tommi Suni, I. Suni, S.S. Lau, Wolfgang Ensinger

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Electrical EngineeringWafer Scale ProcessingEngineeringSurface ScienceApplied PhysicsSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsHydrogen-implanted Si WafersSemiconductor Device

References

	Year	Citations

Page 1

Page 1