Adjustable four-electrode electron mirror as an aberration corrector

Abstract

A numerical analysis of a four-electrode electrostatic mirror is presented. The results indicate that this mirror provides correct aberrations as a corrector for electron optical systems and unlike all other mirror configurations known to date, this new system shows for the first time that an adjustable mirror, both in magnitude of the aberration coefficients and in the ratio of CS/Cc, can indeed be found in a practical system.