Journal of Vacuum Science and Technology · 1978 · 59 citations · 0 references
Natural SciencesElectrical EngineeringPhysicsElectromagneticsOpticsPlasma PhysicsLens SystemsOptical AberrationsPhysical OpticsSpherical AberrationAberration CoefficientsBeam Focusing LensesBeam OpticsElectron Beam FocusingElectron Beam OpticsField EmissionLensesSpherical Aberration Correction
Focusing properties and aberration coefficients are calculated for electrostatic einzel lenses suitable for use as preaccelerator lenses in field-emission electron guns. Various lens shapes are analyzed, and asymmetric designs with conical central electrodes are found to have reduced spherical aberration. A lens shape with optimized geometry is found to have a spherical aberration coefficient of less than six times the working distance from the lens to the focal point. This lens has a bored conical central electrode located close to a thin first electrode. Calculations indicate that a field-emission gun using such a lens should be able to provide a 0.24 μA beam from a 1100 Å effective source size into an emission half-angle of 2.4×10−2 rad. At lower emission angles the source size would be limited by chromatic rather than spherical aberration.