Sensors and Actuators A Physical · 2008 · 25 citations · 22 references
EngineeringBioengineeringBiomedical EngineeringBiomemsMicroelectromechanical SystemsMicrofabricationMicrofabrication ProcessesMicrofluidic BiosensorsMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidic SystemsMicrofluidicsMicrofabrication For BiosensorsMicrofluidic Diagnostic PlatformsMicroreactor DesignMicroreactor TechnologyMicroreactors
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E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations