Concepedia
Statistics
Publications
53
Citations
1.2K
H-Index
20
Active since
1988
Affiliations
University of Hyogo(Current)
NTT Basic Research Laboratories
Hyogo Prefectural Institute of Technology
University of Yamanashi
Japan Advanced Institute of Science and Technology
Yuichi Utsumi is an author at University of Hyogo specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceChemistryMicrofabricationMicrofluidicsChemical EngineeringSynchrotron RadiationBiomedical EngineeringPhysics
Publications per year
1988–2023
Chemiluminescence Detection for a Microchip Capillary Electrophoresis System Fabricated in Poly(dimethylsiloxane)
Bi‐Feng Liu, Motoaki Ozaki, Yuichi Utsumi et al. · Analytical Chemistry · 2002 · 133 citations
Engineering, Analytical Microsystems, Peak Symmetry +19
Microfluidic Chip toward Cellular ATP and ATP-Conjugated Metabolic Analysis with Bioluminescence Detection
Bi‐Feng Liu, Motoaki Ozaki, Hideaki Hisamoto et al. · Analytical Chemistry · 2004 · 91 citations
Synchrotron radiation excited Si epitaxial growth using disilane gas source molecular beam system
Junichi Takahashi, Yuichi Utsumi, Housei Akazawa et al. · Applied Physics Letters · 1991 · 47 citations
Semiconductors, Si Epitaxial Growth, Epitaxial Growth +14
Oxygen addition effects in synchrotron radiation excited etching using SF6
Yuichi Utsumi, Junichi Takahashi, Tsuneo Urisu · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 42 citations
Engineering, Vacuum Device, Oxygen Addition +19
Large-Area X-ray Lithography System for LIGA Process Operating in Wide Energy Range of Synchrotron Radiation
Yuichi Utsumi, T. Kishimoto, Tadashi Hattori et al. · Japanese Journal of Applied Physics · 2005 · 41 citations
Engineering, Electron-beam Lithography, Microscopy +19
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