Concepedia

T. Kishimoto

TK

Statistics

Publications

3

Citations

86

H-Index

3

Active since

2005

Affiliations

University of Hyogo(Current)

Toyama College

T. Kishimoto is an author at University of Hyogo specializing in applied physics, x-ray imaging, and synchrotron radiation.

Top concepts

Publications per year

2005–2006

3

Publications

3

Large-Area X-ray Lithography System for LIGA Process Operating in Wide Energy Range of Synchrotron Radiation

Yuichi Utsumi, T. Kishimoto, Tadashi Hattori et al. · Japanese Journal of Applied Physics · 2005 · 41 citations

, , +19

Large area and wide dimension range x-ray lithography for lithographite, galvanoformung, and abformung process using energy variable synchrotron radiation

Yuichi Utsumi, T. Kishimoto · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 33 citations

, , +20

Large area and wide dimensions X-ray lithography using energy variable synchrotron radiation

Yuichi Utsumi, T. Kishimoto, Tadashi Hattori et al. · Microsystem Technologies · 2006 · 12 citations

, , +8

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