Improvement of thickness uniformity in nickel electroforming for the LIGA process

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

Engineering, Materials Engineering, Materials Science +16

A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs

Md. Shafiqul Islam, P.J. McNally · Microelectronic Engineering · 1998 · 606 citations

Engineering, Electrical Engineering, Materials Science +14

Modern Electroplating

F. A. Lowenheim, S. Senderoff · Journal of The Electrochemical Society · 1964 · 149 citations

Social Sciences, Communication, Electrochemistry +6

Metallic microstructures fabricated using photosensitive polyimide electroplating molds

A. Bruno Frazier, Mark G. Allen · Journal of Microelectromechanical Systems · 1993 · 129 citations

Engineering, Materials Engineering, Materials Science +17

Fabrication of assembled micromechanical components via deep X-ray lithography

K. Guckel, K.J. Skrobis, Todd R. Christenson et al. · 2002 · 86 citations

Engineering, Manufacturing Engineering, Materials Science +12