Analytical Chemistry · 2010 · 67 citations · 45 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationPolymer ChemistryPolymer MaterialsMicrofabrication MaterialsMicrofabrication ProcessesMicrofluidic Device FabricationBondingBonding Strength MeasurementCorona Discharge TreatmentCyclic Olefin PolymersPolydimethylsiloxane Device FabricationPolymer Surface ModificationPolymethyl MethacrylateThermoplastic Microfluidic Fabrication
Thermoplastics such as cyclic olefin copolymer (COC) and polymethylmethacrylate (PMMA) have been increasingly used in fabricating microfluidic devices. However, the state-of-the-art microvalve technology is a polydimethylsiloxane (PDMS)-based three-layer structure. In order to integrate such a valve with a thermoplastics-based microfluidic device, a bonding method for thermoplastics/PDMS must be developed. We report here a method to bond COC with PDMS through surface activation by corona discharge, surface modification using 3-(trimethoxysilyl)propyl methacrylate (TMSPMA), and thermal annealing. The method is also applicable to PMMA. The bonding strength between thermoplastics and PDMS was represented by the peeling force, which was measured using a method established by the International Organization for Standardization (ISO). The bonding strength measurement offered an objective and quantitative indicator for protocol optimization, as well as comparison with other PDMS-associated bonding methods. Using optimized bonding conditions, two valve arrays were fabricated in a COC/PDMS/COC device and cyclic operations of valve closing/opening were successfully demonstrated. The valve-containing devices withstood 100 psi (∼689 KPa) without delamination. Further, we integrated such valve arrays in a device for protein separation and demonstrated isoelectric focusing in the presence of valves.
45
Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography
Marc Unger, Hou-Pu Chou, Todd Thorsen et al. · Science · 2000 · 4K citations
Microfluidic Large-Scale Integration
Todd Thorsen, Sebastian J. Maerkl, Stephen R. Quake · Science · 2002 · 2.2K citations · Full text
Holger Becker · Talanta · 2002 · 1.2K citations
Shantanu Bhattacharya, Aniruddha Datta, Jordan M. Berg et al. · Journal of Microelectromechanical Systems · 2005 · 851 citations