Optical Materials · 2013 · 16 citations · 12 references
Materials ScienceIon ImplantationEngineeringApplied PhysicsAmorphous SiliconSemiconductor Device FabricationThin FilmsSilicon On InsulatorOptoelectronicsCerium IonsThin Film Processing
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Optical doping of waveguide materials by MeV Er implantation
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Visible cathodoluminescence of Er-doped amorphous AlN thin films
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