Publication | Closed Access

Influence of substrate temperature and Zn-precursors on atomic layer deposition of polycrystalline ZnO films on glass

Materials SciencePolycrystalline Zno FilmsEngineeringOxide ElectronicsSurface ScienceApplied PhysicsSubstrate TemperatureChemical DepositionChemical Vapor DepositionAtomic Layer DepositionThin Film Processing