A facile route to patterned epitaxial ZnO nanostructures by soft lithography

Abstract

Combining two robust, facile, and low cost techniques—nanoimprint lithography and low temperature aqueous solution phase epitaxy of ZnO—enabled the fabrication of nanostructured single crystal surfaces. Various patterns were fabricated with sub-micron resolution, including an array of 70 nm diameter posts. The method requires no vacuum equipment and has a maximum process temperature of 110 °C.