Two-dimensional plastic microlens arrays by deep lithography with protons: fabrication and characterization

Abstract

In this paper we focus on the fabrication of individual plastic refractive microlenses with Deep Lithography with Protons (DLP). We give a detailed description of the microlens fabrication technique and the calibration procedure that goes along with it. We highlight the geometrical and optical characteristics of these DLP microlenses and we demonstrate the reproducibility of the fabrication process. We also illustrate the prototyping flexibility of DLP by making arrays featuring microlenses with different sags, pitches and diameters. 1.