Simulation aspects of a thermal accelerometer

Integrated thermopile sensors

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Silicon accelerometer based on thermopiles

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Engineering, Electrical Engineering, Mechanical Engineering +12

A novel accelerometer based on a silicon thermopile

R. Hiratsuka, D.C. van Duyn, T. Otaredian et al. · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 34 citations

Engineering, Electrical Engineering, Mechanical Engineering +17