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Dielectric charging in silicon nitride films for MEMS capacitive switches: Effect of film thickness and deposition conditions

Materials ScienceElectrical EngineeringEngineeringMicrofabricationFilm ThicknessApplied PhysicsMems Capacitive SwitchesSemiconductor Device FabricationThin FilmsMicro-electromechanical SystemMicroelectronicsSilicon On InsulatorSilicon Nitride FilmsSemiconductor Device