Dielectric charging in silicon nitride films for MEMS capacitive switches: Effect of film thickness and deposition conditions

Non-symmetrical dielectric relaxation behaviour arising from a simple empirical decay function

Graham Williams, David C. Watts · Transactions of the Faraday Society · 1970 · 4.3K citations

Relaxation Process, Engineering, Responsive Polymers +20

Stretched exponential relaxation in molecular and electronic glasses

J. C. Phillips · Reports on Progress in Physics · 1996 · 905 citations

Relaxation Process, Engineering, Physics +12

Poole-Frenkel Effect and Schottky Effect in Metal-Insulator-Metal Systems

J.G. Simmons · Physical Review · 1967 · 796 citations

Charge Excitations, Engineering, Poole-frenkel Effect +18

Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)

Jürgen Wibbeler, Günter Pfeifer, Michael Hietschold · Sensors and Actuators A Physical · 1998 · 297 citations

Electrical Engineering, Dielectrics, Engineering +9

Temperature study of the dielectric polarization effects of capacitive RF MEMS switches

G. Papaioannou, M.-N. Exarchos, V. Theonas et al. · IEEE Transactions on Microwave Theory and Techniques · 2005 · 118 citations

Dielectrics, Engineering, Micro-electromechanical System +16