AMANDA—surface micromachining, molding, and diaphragm transfer

Hot embossing - The molding technique for plastic microstructures

M. Heckele, W. Bacher, K. Müller · Microsystem Technologies · 1998 · 281 citations

Engineering, Manufacturing Engineering, Materials Engineering +8

Microvalves with bistable buckled polymer diaphragms

C. Goll, W. Bacher, B. Büstgens et al. · Journal of Micromechanics and Microengineering · 1996 · 122 citations

Engineering, Materials Engineering, Materials Science +17

An electrostatically actuated polymer microvalve equipped with a movable membrane electrode

C. Goll, W. Bacher, B. Büstgens et al. · Journal of Micromechanics and Microengineering · 1997 · 64 citations

Engineering, Electrical Engineering, Materials Engineering +16

A microvalve system fabricated by thermoplastic molding

Jens Fahrenberg, W. Bier, D. Maas et al. · Journal of Micromechanics and Microengineering · 1995 · 57 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +15

Silicon based replication technology of 3D-microstructures by conventional CD-injection molding techniques

Olle Larsson, Ove Öhman, Åke Billman et al. · 2002 · 35 citations

Engineering, Manufacturing Engineering, Materials Engineering +17