AMANDA—surface micromachining, molding, and diaphragm transfer - Concepedia

Concepedia

Publication | Closed Access

AMANDA—surface micromachining, molding, and diaphragm transfer

38

Citations

9

References

1999

Year

Werner Karl Schomburg, Ralf Ahrens, W. Bacher, Jack Martin, V. Saile

Sensors and Actuators A Physical

EngineeringMicromachinesMicrofabricationMechanical EngineeringAmanda—surface MicromachiningMicro TechnologyMolding (Process)

References

	Year	Citations

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