Sensors and Actuators A Physical · 2003 · 155 citations · 14 references
EngineeringMechanical EngineeringMechatronics EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationMems ActuatorsMems CharacterizationMems DesignMicrofabrication ProcessesPiezoelectric ActuationPiezoelectric ActuatorsAnalytical ModelsMicroactuatorsMicroelectromechanical ActuatorsMicropumpsPiezoelectric Mems Actuators
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