Concepedia

Fabrication and evaluation of an on-chip micro-variable inductor

Takashi Fukushige, Yoshisato Yokoyama, Seiichi Hata, Kazuya Masu, A. Shimokohbe

Microelectronic Engineering · 2003 · 27 citations · 2 references

DOI

Concepts

References

2

Thermal, Mechanical and Electrical Properties of Pd-Based Thin-Film Metallic Glass

Yongdong Liu, Seiichi Hata, K. Wada et al. · Japanese Journal of Applied Physics · 2001 · 115 citations

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<title>Fabrication of thin film metallic glass and its application to microactuators</title>

Seiichi Hata, Kaiji Sato, Akira Shimokohbe · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 36 citations

, , +16