Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 42 citations · 25 references
Natural SciencesChemistryMaterials ScienceAnalytical ChemistryInorganic ChemistryMaterials CharacterizationInorganic Elemental AnalysisInorganic SpectroscopyMetal OxidesOxide Thickness MeasurementOxygen Content AnalysisOxygen Determination
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L. Young, H. A. Liebhafsky · Physics Today · 1962 · 910 citations
Principles and applications of ion beam techniques for the analysis of solids and thin films
J. W. Mayer, M‐A. Nicolet, T.M. Buck et al. · Thin Solid Films · 1973 · 332 citations