Performance improvement of a vibration-powered electromagnetic generator by reduced silicon surface roughness

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM

Takahiro Namazu, Yoshitada Isono, Tomoki Tanaka · Journal of Microelectromechanical Systems · 2000 · 383 citations

Engineering, Materials Engineering, Materials Science +17

Chemical Etching of Silicon: IV . Etching Technology

B. Schwartz, Harry Robbins · Journal of The Electrochemical Society · 1976 · 350 citations

Natural Sciences, Materials Engineering, Materials Science +17

Slow Crack Growth in Single-Crystal Silicon

J. A. Connally, Stuart B. Brown · Science · 1992 · 185 citations

Engineering, Materials Engineering, Materials Science +17

Controlling and Testing the Fracture Strength of Silicon on the Mesoscale

Kuo‐Shen Chen, Arturo A. Ayón, S.M. Spearing · Journal of the American Ceramic Society · 2000 · 119 citations

Engineering, Materials Engineering, Materials Science +17