Dielectric charging in radio frequency microelectromechanical system capacitive switches: A study of material properties and device performance

Abstract

The paper analyze the direct relation between the dielectric polarization mechanisms and the radio frequency microelectromechanical system capacitive switches performance. The dielectric polarization mechanisms are investigated in metal-insulator-metal capacitors with the aid of the thermally stimulated depolarization current method. The performance of microelectromechanical system is studied through the temperature dependence of the bias for the minimum capacitance. The simultaneous assessment allows the discrimination of dipolar and space charge polarization that allows the prediction of the shift of capacitance minimum with temperature.