Concepedia

Correlation of failure mechanism of constant-current-stress and constant-voltage-stress breakdowns in ultrathin gate oxides of nMOSFETs by TEM

K. L. Pey, Ching‐Hsuan Tung, M. Radhakrishnan, Lei Tang, Yuankun Sun, Xinrui Wang, Wenxie Lin

Microelectronics Reliability · 2003 · 24 citations · 0 references

Concepts

EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor DevicesDevice CharacterizationDevice ReliabilityFailure TheoriesMetal-oxide-semiconductor Field-effect TransistorsOxide SemiconductorsSemiconductor ReliabilityBreakdown MechanismsGate Oxide DegradationGate Oxide InterfacesGate Oxide ReliabilityGate Oxide Thickness EffectsGate OxidesOxide Breakdown