Surface Science · 1976 · 46 citations · 23 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface ChemistrySurface ScienceThin FilmsCoatingsSurface CharacterizationSurface CoatingsSurface ModificationSurface PhysicsThin-film DepositionSputter DepositionSputteringSputtering ProcessesSputtering TechniquesSurface Composition
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