M. L. Tarng

Alloy Sputtering Studies with <i>in situ</i> Auger Electron Spectroscopy

M. L. Tarng, G. K. Wehner · Journal of Applied Physics · 1971 · 184 citations · Full text

Materials Science, Ev Ion Energy, Alloy Sputtering Studies +15

Hydrogenation and dehydrogenation of amorphous and crystalline silicon

J. I. Pánkové, Murray A. Lampert, M. L. Tarng · Applied Physics Letters · 1978 · 171 citations

Materials Science, Crystalline Silicon, Crystalline Si +12

Amorphous silicon as a passivant for crystalline silicon

J. I. Pánkové, M. L. Tarng · Applied Physics Letters · 1979 · 146 citations

Materials Science, Electrical Engineering, Crystalline Silicon +12

Escape length of Auger electrons

M. L. Tarng, G. K. Wehner · Journal of Applied Physics · 1973 · 127 citations

Electrical Engineering, Engineering, Electron-beam Lithography +14

Carrier transport in oxygen-rich polycrystalline-silicon films

M. L. Tarng · Journal of Applied Physics · 1978 · 112 citations

Engineering, Silicon On Insulator, Grain Size +17