Concepedia
Sensors and Actuators A Physical · 2000 · 131 citations · 1 references
EngineeringAerospace EngineeringMechanical EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationMems ActuatorsMems DesignMems FabricationMems MaterialsMems ModelingMems TestingMicromechanical Oscillators
1
Silicon Microvalves For Gas Flow Control
P.W. Barth · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 72 citations
Engineering, Electrical Engineering, Mechanical Engineering +14