Concepedia

Structure and electric properties of TiO2 films prepared by cold plasma torch under atmospheric pressure

Hye Jin HA, Bum Ki Moon, Takao Horiuchi, Takashi Inushima, Hiroshi Ishiwara, Hideomi Koinuma

Materials Science and Engineering B · 1996 · 17 citations · 8 references

DOI

Concepts

References

8

Charging of pattern features during plasma etching

John Arnold, Herbert H. Sawin · Journal of Applied Physics · 1991 · 292 citations

, , +15

Development and application of a microbeam plasma generator

Hideomi Koinuma, Hiroyuki Ohkubo, Takuya Hashimoto et al. · Applied Physics Letters · 1992 · 161 citations · Full text

, , +12

Thin TiO2 Films Prepared by Low Pressure Chemical Vapor Deposition

N. Rausch, Edmund P. Burte · Journal of The Electrochemical Society · 1993 · 154 citations · Full text

, , +17

Surface cleaning using sputtering

E. Taglauer · Applied Physics A · 1990 · 100 citations

, , +10

Raman spectroscopy of thermally annealed TiO2 thin films

Aleksandra Turković, Mile Ivanda, A. Drašner et al. · Thin Solid Films · 1991 · 70 citations

, , +14