Surface cleaning using sputtering

A Monte Carlo computer program for the transport of energetic ions in amorphous targets

J.P. Biersack, L.G. Haggmark · Nuclear Instruments and Methods · 1980 · 4.7K citations

Engineering, Materials Science, Physics +16

Surface Studies by Scanning Tunneling Microscopy

G. Binnig, H. Rohrer, Ch. Gerber et al. · Physical Review Letters · 1982 · 4.6K citations · Full text

Natural Sciences, Materials Science, Physics +14

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

Natural Sciences, Physics, Atomic Physics +13

Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation

Mark T. Robinson, Ian M. Torrens · Physical review. B, Solid state · 1974 · 1.6K citations

Natural Sciences, Materials Science, Physics +17

Low energy electrons and surface chemistry

Steven L. Suib · Journal of Solid State Chemistry · 1987 · 915 citations

Natural Sciences, Chemistry, Physics +14