Piezomagnetic tuning of a micromachined resonator

Abstract

We have been developing a range of high performance thin film and multilayer piezomagnetic materials for possible integration in to microelectromechanical systems. In this paper we demonstrate that the resonant frequency of a micromachined resonant beam may be tuned using the /spl Delta/E effect associated with such piezomagnetic materials. This demonstration of principle leads directly to methods of addressing inherent problems such as thermal drift or ageing in microsystems. We also present a discussion of the benefits to be derived from the use of piezomagnetic materials in such applications.