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Preparation of silane modified SiO2 abrasive particles and their Chemical Mechanical Polishing (CMP) performances

Materials ScienceMaterials EngineeringChemical EngineeringSio2 Abrasive ParticlesEngineeringMolecular SieveMaterial ProcessingMicrofabricationSurface ScienceSiliceneChemistryChemical Mechanical PolishingSurface ProcessingAbrasive Process