Applied Physics Letters · 2000 · 81 citations · 14 references
EngineeringElectrical EngineeringMicroelectromechanical SystemsMicroelectronicsSemiconductor DevicesDisplacement SensorsMicroelectromechanical SensorsNoise In Electronic DevicesNoise In Semiconductor DevicesQuantum TunnelingSemiconductor DetectorsDisplacementDisplacement Sensor SensitivityElectrometer SystemsNoise In Metal-oxide-semiconductor Field-effect TransistorsQuantum Tunneling EffectsSensitivityShot Noise AnalysisSingle-electron Transistors
We investigate the tunneling shot noise limits on the sensitivity of a micromechanical displacement detector based on a metal junction, radio-frequency single-electron transistor (rf SET). In contrast with the charge sensitivity of the rf-SET electrometer, the displacement sensitivity improves with increasing gate voltage bias and, with a suitably optimized rf SET, displacement sensitivities of 10−6 Å/Hz may be possible.
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Magnetic resonance force microscopy
John A. Sidles, Joseph L. Garbini, K. J. Bruland et al. · Reviews of Modern Physics · 1995 · 465 citations