Concepedia

Publication | Closed Access

Application of microforging to SiCN MEMS fabrication

DOI

74

Citations

6

References

2002

Year

Yiping Liu, Li‐Anne Liew, Ruiling Luo, Linan An, Martin L. Dunn, Victor M. Bright, John W. Daily, Rishi Raj
Sensors and Actuators A Physical

References

YearCitations

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