Application of microforging to SiCN MEMS fabrication

A silicoboron carbonitride ceramic stable to 2,000°C

Ralf Riedel, Andreas Kienzle, Lutz Ruwisch et al. · Nature · 1996 · 722 citations

Materials Science, Materials Engineering, Engineering +7

Hot embossing as a method for the fabrication of polymer high aspect ratio structures

Holger Becker, Ulf Heim · Sensors and Actuators A Physical · 2000 · 658 citations

Materials Science, Polymer Material, Engineering +8

Synthesis of dense silicon-based ceramics at low temperatures

Ralf Riedel, G. Passing, Herbert Schönfelder et al. · Nature · 1992 · 349 citations

Materials Science, Low Temperatures, Engineering +5

Polymer-derived Si-based bulk ceramics, part I: Preparation, processing and properties

Ralf Riedel, Martin Seher, Joachim Mayer et al. · Journal of the European Ceramic Society · 1995 · 116 citations

Materials Science, Silicate Ceramics, Engineering +9

Formation of Complex Ceramic Miniaturized Structures by Pyrolysis of Poly(vinylsilazane)

H. Freimuth, Volker Hessel, Harald Kölle et al. · Journal of the American Ceramic Society · 1996 · 26 citations

Engineering, Mechanical Engineering, Functional Ceramic +18