Microstructure of novel superhard nanocrystalline-amorphous composites as analyzed by high resolution transmission electron microscopy

Silke Christiansen, M. Albrecht, H. P. Strunk, S. Vepřek

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 118 citations · 6 references

Concepts

Abstract

The recently developed, novel superhard nanocrystalline composites nc-TiN/a-Si3N4 have been investigated by means of high resolution transmission electron microscopy. The microstructure consisting of nanocrystalline TiN imbedded within a⩽1 nm thin amorphous Si3N4, the relative amount of both phases, and the TiN-crystallite size which were previously determined by means of x-ray diffraction and energy dispersive analysis of x rays have been directly confirmed.

References

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