Ti-Si-N films prepared by plasma-enhanced chemical vapor deposition

The plasma-assisted chemical vapour deposition of TiC, TiN and TiCxN1−x

N.J. Archer · Thin Solid Films · 1981 · 117 citations

Natural Sciences, Materials Engineering, Materials Science +11

Preparation and some properties of chemically vapour-deposited Si3N4-TiN composite

Toshio Hirai, Shinsuke Hayashi · Journal of Materials Science · 1982 · 78 citations

Natural Sciences, Materials Engineering, Materials Science +12

Plasma chemical vapor deposition of TiN

Shizhi Li, Wu Huang, Hongshun Yang et al. · Plasma Chemistry and Plasma Processing · 1984 · 47 citations

Natural Sciences, Materials Engineering, Materials Science +11

Microstructure of Si3N4-TiN composites prepared by chemical-vapour deposition

Shinsuke Hayashi, Toshio Hirai, Kenji Hiraga et al. · Journal of Materials Science · 1982 · 39 citations

Natural Sciences, Materials Engineering, Materials Science +14

TiN coatings on M2 steel produced by plasma-assisted chemical vapor deposition

Michael R. Hilton, G.J. Vandentop, Miquel Salmerón et al. · Thin Solid Films · 1987 · 33 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16