Etching of DLC films using a low intensity oxygen plasma jet

Diamond-like carbon: state of the art

A. Grill · Diamond and Related Materials · 1999 · 1K citations

Natural Sciences, Materials Engineering, Materials Science +8

Modeling studies of amorphous carbon

David Beeman, J. Silverman, R. Lynds et al. · Physical review. B, Condensed matter · 1984 · 694 citations

Natural Sciences, Materials Science, Physics +17

Surface processes in MEMS technology

Roya Maboudian · Surface Science Reports · 1998 · 277 citations

Engineering, Materials Science, Mechanical Engineering +12

The working principle of the hollow-anode plasma source

André Anders, S. Anders · Plasma Sources Science and Technology · 1995 · 77 citations

Natural Sciences, Physics, Electronic Materials +14

Novel Low k Dielectrics Based on Diamondlike Carbon Materials

A. Grill, V. Patel, C. Jahnes · Journal of The Electrochemical Society · 1998 · 62 citations

Natural Sciences, Materials Engineering, Materials Science +17