Piezojunction effect based pressure sensor

Abstract

The Letter describes a method for fabricating integrated pressure sensors based on the piezojunction effect. Localised stress concentration is realised via a micromachining-fabricated needle-like structure, which is an integral part of the diaphragm. Such a stress concentrator emulates the previously used hard stylus. Owing to the absence of any friction, a reliable and hysteresis-free output was obtained.