High sensitivity acoustic transducers with thin p+ membranes and gold back-plate

ZnO on Si integrated acoustic sensor

Michel Royer, J. Holmen, M. A. Wurm et al. · Sensors and Actuators · 1983 · 153 citations

Engineering, Electrical Engineering, Acoustics +9

High-performance condenser microphone with fully integrated CMOS amplifier and DC-DC voltage converter

Mark R. Pederson, Wouter Olthuis, P. Bergveld · Journal of Microelectromechanical Systems · 1998 · 104 citations · Full text

Engineering, Electrical Engineering, Acoustics +15

A subminiature condenser microphone with silicon nitride membrane and silicon back plate

Dietmar Hohm, Gisela Hess · The Journal of the Acoustical Society of America · 1989 · 103 citations

Engineering, Mechanical Engineering, Physics +16

Micromachined subminiature condenser microphones in silicon

Wolfgang Kühnel, G. Hess · Sensors and Actuators A Physical · 1992 · 60 citations

Engineering, Electrical Engineering, Mechanical Engineering +12

An integrated silicon capacitive microphone with frequency-modulated digital output

Michael Pedersen, Wouter Olthuis, Piet Bergveld · Sensors and Actuators A Physical · 1998 · 27 citations · Full text

Engineering, Biomedical Engineering, Electrical Engineering +14