Publication | Open Access

Structural properties and electronic transport in intrinsic microcrystalline silicon deposited by the VHF-GD technique

Materials ScienceElectrical EngineeringStructural PropertiesEngineeringNanoelectronicsApplied PhysicsVhf-gd TechniqueSemiconductor MaterialSemiconductor Device FabricationIntrinsic Microcrystalline SiliconMicroelectronicsSilicon On Insulator