Publication | Closed Access
The effect of angle of incidence to low damage sputtering of organic polymers using a C60 ion beam
32
Citations
7
References
2008
Year
Materials EngineeringMaterials ScienceEngineeringBeam LithographyElectron-beam LithographyTarget FabricationPolymer ScienceApplied PhysicsIon BeamChemistryC60 Ion BeamLow Damage SputteringPolymer ChemistryOrganic Polymers
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