Concepedia

Takuya Miyayama

TM

16

Publications

630

Citations

13

H-Index

2008

Active since

Affiliations

Ulvac-Phi (Japan)(Current)

Applied Physical Electronics (United States)

MPC Computers (United States)

Kyushu University

Swiss Federal Laboratories for Materials Science and Technology

Takuya Miyayama is an author at Ulvac-Phi (Japan) specializing in engineering, chemistry, and materials science.

ORCID

Top concepts

Publications per year

2008–2022

16

Publications

16

Argon Cluster Ion Beams for Organic Depth Profiling: Results from a VAMAS Interlaboratory Study

Alexander G. Shard, Rasmus Havelund, M. P. Seah et al. · Analytical Chemistry · 2012 · 140 citations

Removal of Ar <sup>+</sup> beam‐induced damaged layers from polyimide surfaces with argon gas cluster ion beams

Takuya Miyayama, N. Sanada, Scott R. Bryan et al. · Surface and Interface Analysis · 2010 · 112 citations

X-ray photoelectron spectroscopy study of polyimide thin films with Ar cluster ion depth profiling

Takuya Miyayama, N. Sanada, M. Suzuki et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2010 · 77 citations

, , +17

Concepts for chemical state analysis at constant probing depth by lab‐based XPS/HAXPES combining soft and hard X‐ray sources

Sebastian Siol, Jennifer E. Mann, John Newman et al. · Surface and Interface Analysis · 2020 · 52 citations · Full text

The effect of angle of incidence to low damage sputtering of organic polymers using a C60 ion beam

Takuya Miyayama, N. Sanada, Shin‐ichi Iida et al. · Applied Surface Science · 2008 · 32 citations

, , +11

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