Oxygen incorporation and precipitation behavior in heavily boron-doped Czochralski silicon crystals

Oxygen Content of Silicon Single Crystals

W. Kaiser, P. H. Keck · Journal of Applied Physics · 1957 · 253 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

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2007 · 176 citations

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An Etch for Delineation of Defects in Silicon

Kuo‐Hsin Yang · Journal of The Electrochemical Society · 1984 · 173 citations

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Ron S. Kenett, Paul Newbold · Journal of the Royal Statistical Society Series D (The Statistician) · 1988 · 127 citations

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Impurity diffusion and gettering in silicon

Richard B. Fair, Charles Pearce, J. Washburn · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 1985 · 122 citations

Engineering, Materials Engineering, Materials Science +17