Applied Physics Letters · 1989 · 626 citations · 20 references
Natural SciencesMaterials SciencePhysicsMagnetic MaterialsOpticsSensorsAtomic Force MicroscopyForce SensingForce SensorsInterferometryMechanical SensorsOptical FibersAtomic-resolution ImagingFiber Optic Displacement SensorsFiber-optic Force SensorsFiber-optic SensorsInterferenceLow-frequency NoiseMagnetic Force SensorsSingle-mode Optical Fibers
The authors present a high‑sensitivity fiber‑optic displacement sensor for atomic force microscopy. The sensor uses optical interference in a micron‑sized cavity between the cleaved end of a single‑mode fiber and the microscope cantilever. The all‑fiber design yields a compact, mechanically robust sensor with sub‑0.1 Å peak‑to‑peak noise in 0–1 kHz and demonstrates atomic‑resolution imaging of graphite and magnetic‑force imaging of disk bits.
A high-sensitivity fiber-optic displacement sensor for atomic force microscopy is described. The sensor is based on the optical interference occurring in the micron-sized cavity formed between the cleaved end of a single-mode optical fiber and the microscope cantilever. As a result of using a diode laser light source and all-fiber construction, the sensor is compact, mechanically robust, and exhibits good low-frequency noise behavior. Peak-to-peak noise in a dc to 1 kHz bandwidth is less than 0.1 Å. Images are presented demonstrating atomic resolution of graphite and magnetic force imaging of bits written on a magnetic disk.
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G. Binnig, C. F. Quate, Ch. Gerber · Physical Review Letters · 1986 · 14.4K citations · Full text
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