Electrical and plasma parameters of ICP with high coupling efficiency

Abstract

A novel design of ICP with high coupling efficiency is presented. The efficiency augmentation is achieved using a thin window and an antenna coil enhanced by a ferromagnetic core. Considerable improvement of ICP electrical and plasma characteristics is demonstrated through experiments in ICP operated at 2 MHz in a wide range of argon gas pressures between 1 mTorr and 1 Torr, and discharge power between 15 W and 0.5 KW.