Concepedia

Oxygen concentration changes in oxygen-doped molybdenum films under high temperature annealing

Shin‐ichi Ohfuji

Thin Solid Films · 1984 · 14 citations · 10 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceInorganic ChemistryMaterials ChemistryThin FilmsDopingOxygen EvolutionRare-earth-doped MaterialsSurface PhysicsThin Film AnnealingThin Film OxidationAnnealing Temperature EffectsCritical Oxygen ConcentrationMolybdenum ChemistryOxygen Concentration EffectsOxygen DiffusionOxygen VacanciesOxygen Vacancy Formation

References

10

Refractory silicides for integrated circuits

S. P. Murarka · Journal of Vacuum Science and Technology · 1980 · 601 citations

Engineering, Electrical Engineering, Materials Science +17

Oxidation of Molybdenum 550° to 1700°C

Earl A. Gulbransen, K. F. Andrew, Fred A. Brassart · Journal of The Electrochemical Society · 1963 · 211 citations

Natural Sciences, Chemical Engineering, Chemistry +14

Vapor Pressure of Molybdenum Trioxide

Earl A. Gulbransen, K. F. Andrew, Fred A. Brassart · Journal of The Electrochemical Society · 1963 · 64 citations

Natural Sciences, Chemistry, Materials Science +7

The initial oxidation of molybdenum

H.M. Kennett, A.E. Lee · Surface Science · 1975 · 48 citations

Natural Sciences, Chemistry, Inorganic Chemistry +7

The initial oxidation of molybdenum

H.M. Kennett, A.E. Lee · Surface Science · 1975 · 39 citations

Natural Sciences, Chemistry, Inorganic Chemistry +7