Bulletin of Materials Science · 2012 · 36 citations · 25 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsFilm Growth MechanismsMagnetron SputteringNitride Thin FilmsReactive SputteringSputter DepositionSputteringSputtering ProcessesThin-film Growth Mechanisms
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Reactive-sputter-deposited TiN films on glass substrates
Joshua Pelleg, Levy Zevin, S. Lungo et al. · Thin Solid Films · 1991 · 744 citations
Natural Sciences, Materials Engineering, Materials Science +14
V.K. William Grips, V. Ezhil Selvi, Harish C. Barshilia et al. · Electrochimica Acta · 2005 · 123 citations
Natural Sciences, Materials Engineering, Materials Science +15