<title>Fast micromachining using picosecond lasers</title>

Abstract

Laser micromachining is mostly based, so far, on Q-switched laser sources. Their nanosecond pulse width often limits the accuracy and quality of laser processes by thermally initiated effects. Precision micromachining benefits from ultra short laser pulses. Up to now mostly amplified fs lasers with low repetition rates were used, with the result of low processing speed. New diode pumped solid-state picosecond lasers can also meet the demands of precise micro-machining. Their pulse duration of about 10 picoseconds provide the optimum performance e.g. for metal processing. These lasers also provide high average powers and much higher repetition rates of more then 100 kHz to maximize throughput. New potentials of picosecond lasers for the processing of different materials with high precision and increased speed will be discussed.