Concepedia

Modeling secondary electron images for linewidth measurement by critical dimension scanning electron microscopy

Mauro Ciappa, A. Koschik, Maurizio Dapor, Wolfgang Fichtner

Microelectronics Reliability · 2010 · 38 citations · 3 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsInstrumentationSpectroscopyElectron Beam PhysicsElectron DiffractionElectron MicroscopyCritical Dimension MetrologyLinewidth BroadeningScanning Electron Microscope MetrologyScanning Electron MicroscopyScanning Electron Microscopy AnalysisSecondary Electron Emission

References

3

Monte Carlo modeling in the low-energy domain of the secondary electron emission of polymethylmethacrylate for critical-dimension scanning electron microscopy

Mauro Ciappa · Journal of Micro/Nanolithography MEMS and MOEMS · 2010 · 62 citations

Natural Sciences, Materials Engineering, Materials Science +17

Monte Carlo modeling of secondary electron imaging in three dimensions

John S. Villarrubia, Nicholas W. M. Ritchie, Jeremiah R. Lowney · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 57 citations

Natural Sciences, Electrical Engineering, Physics +14

Evaluation of CD-SEM measurement uncertainty using secondary electron simulation with charging effect

Hideaki Abe, Akira Hamaguchi, Yuichiro Yamazaki · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 13 citations

Engineering, Electrical Engineering, Electronic Materials +11