Intrinsic gettering in germanium-doped Czochralski crystal silicon crystals

Mechanism of the Formation of Donor States in Heat-Treated Silicon

W. Kaiser, H. L. Frisch, Howard Reiss · Physical Review · 1958 · 483 citations

Natural Sciences, Chemistry, Materials Science +16

Intrinsic gettering by oxide precipitate induced dislocations in Czochralski Si

T. Y. Tan, E.E. Gardner, W. K. Tice · Applied Physics Letters · 1977 · 390 citations

Engineering, Materials Engineering, Materials Science +17

Crystal-Originated Singularities on Si Wafer Surface after SC1 Cleaning

Jiro Ryuta, E. Morita, Toshiro Tanaka et al. · Japanese Journal of Applied Physics · 1990 · 229 citations

Natural Sciences, Materials Science, Electronic Materials +12

Mechanism of internal gettering of interstitial impurities in Czochralski-grown silicon

D. Gilles, Eicke R. Weber, Sookap Hahn · Physical Review Letters · 1990 · 211 citations

Engineering, Materials Engineering, Materials Science +14

Observation of Lattice Defects in GaAs and Heat-treated Si Crystals by Infrared Light Scattering Tomography

Kazuo Moriya, Tomoya Ogawa · Japanese Journal of Applied Physics · 1983 · 95 citations

Natural Sciences, Materials Engineering, Materials Science +17