Texture and microstructure of thin copper films - Concepedia

Concepedia

Publication | Closed Access

Texture and microstructure of thin copper films

121

Citations

13

References

1993

Year

D. P. Tracy, D. B. Knorr

Journal of Electronic Materials

Materials ScienceEngineeringSurface ScienceApplied PhysicsThin FilmsThin Copper FilmsThin Film ProcessingMicrostructure

References

	Year	Citations

Page 1