Microrobot actuated by a vibration energy field

Laterally Driven Polysilicon Resonant Microstructures

William C. Tang, Tu-Cuong H. Nguyen, Roger T. Howe · Sensors and Actuators · 1989 · 737 citations

Engineering, Materials Engineering, Materials Science +6

Laterally driven polysilicon resonant microstructures

William C. Tang, T.-C.H. Nguyen, Roger T. Howe · 2003 · 382 citations

Engineering, Materials Engineering, Materials Science +6

Giant magnetostrictive alloy (GMA) applications to micro mobile robot as a micro actuator without power supply cables

Toshio Fukuda, Hidemi HOSOKAI, Hideaki Ohyama et al. · 2002 · 109 citations

Engineering, Mechanical Engineering, Robotics Engineering +13

Creation of an insect-based microrobot with an external skeleton and elastic joints

Kenji Suzuki, Isao Shimoyama, Hiroyuki Miura et al. · 1992 · 69 citations

Engineering, Mechanical Engineering, Robotics Engineering +17

RF telemetry powering and control of hermetically sealed integrated sensors and actuators

Babak Ziaie, K. Najafi · 1990 · 22 citations · Full text

Engineering, Biomedical Engineering, Electrical Engineering +17