Effect of piezoresistor configuration on output characteristics of piezoresistive pressure sensor: an experimental study

Piezoresistance Effect in Germanium and Silicon

Charles S. Smith · Physical Review · 1954 · 2K citations

Natural Sciences, Materials Science, Physics +10

Micromachined pressure sensors: review and recent developments

William P. Eaton, James H. Smith · Smart Materials and Structures · 1997 · 583 citations · Full text

Engineering, Materials Science, Mechanical Engineering +17

Piezoresistancc effect in germanium and silicon

Charlie Smith · Physical Review D · 1954 · 497 citations

Engineering, Materials Engineering, Materials Science +11

Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

Samuel Kelly Clark, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 299 citations

Engineering, Materials Engineering, Mechanical Engineering +17

A new analytical solution for the load-deflection of square membranes

D Maier-Schneider, Julia Maibach · Journal of Microelectromechanical Systems · 1995 · 208 citations

Natural Sciences, Materials Engineering, Materials Science +17